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Flexible display device having enhanced thin film

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专利内容由知识产权出版社提供

专利名称:Flexible display device having enhanced thin

film semiconductive layer and method ofmanufacture

发明人:Byoung-June Kim,Sung-Hoon Yang,Jae-Ho

Choi

申请号:US11677353申请日:20070221公开号:US079250B2公开日:20110621

专利附图:

摘要:A manufacturing method for a flat panel display device includes forming a

barrier layer on a flexible plastic substrate by RF sputtering, forming an amorphoussilicon layer on the plastic substrate, and subjecting the amorphous silicon layer to arapid heat treatment so as to thereby improve electrical characteristics and/orhomogeneity of the amorphous silicon layer.

申请人:Byoung-June Kim,Sung-Hoon Yang,Jae-Ho Choi

地址:Seongnam-si KR,Seoul KR,Seoul KR

国籍:KR,KR,KR

代理机构:Innovation Counsel LLP

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