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专利名称：MEMS MICROPHONE AND METHOD FOR
MANUFACTURING SAME
发明人：Yong-Kook Kim,Chung-Dam Song申请号：US13201112申请日：20100211
公开号：US20110316100A1公开日：20111229
专利附图：
摘要：A micro electro mechanical systems (MEMS) microphone, and a method ofmanufacturing the MEMS microphone having an interval between a membrane and a backplate, the interval being correctly adjusted by forming the membrane and the back plateafter an air-gap forming portion on a silicon substrate. Since the membrane and/or theback plate are/is formed by electroless plating, a sacrificial layer is easily planarized, anda residual stress is easily removed or controlled. The MEMS microphone includes a siliconsubstrate in which a back chamber is formed and on which an air-gap forming portion isformed above the chamber by etching the silicon substrate to a predetermined depthabove the chamber; a membrane formed on the air-gap forming portion of the silicon
substrate or the silicon substrate; and a back plate that is formed on the air-gap formingportion or the silicon substrate so as to be spaced apart from the membrane, wherein anair gap is formed between the membrane and the back plate.
申请人：Yong-Kook Kim,Chung-Dam Song
地址：Seoul KR,Seoul KR
国籍：KR,KR
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